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Preparation of silicon oxynitride (SiOxNy) thin films by pulsed laser deposition

✍ Scribed by Rong-Fu Xiao; Lun Chiu Ng; Chao Jiang; Z. Yang; George K.L. Wong

Book ID
107864871
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
480 KB
Volume
260
Category
Article
ISSN
0040-6090

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