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Channeling in low energy boron ion implantation

✍ Scribed by Michel, A. E.; Kastl, R. H.; Mader, S. R.; Masters, B. J.; Gardner, J. A.

Book ID: 127041206
Publisher: American Institute of Physics
Year: 1984
Tongue: English
Weight: 430 KB
Volume: 44
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.94790

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