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Cathodoluminescence of Ge+, Si+, and O+ implanted SiO2 layers and the role of mobile oxygen in defect transformations

✍ Scribed by H.-J. Fitting; T. Barfels; A.N. Trukhin; B. Schmidt; A. Gulans; A. von Czarnowski


Book ID
117145714
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
372 KB
Volume
303
Category
Article
ISSN
0022-3093

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