AES and USXES investigations of the phase transformation in the surface layers of V-Si/SiO2/Si thin films structure stimulated by oxygen annealing

✍ Scribed by E.P. Domashevskaya; Yu.A. Yurakov; G.A. Veligura; S.A. Bocharov

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 422 KB
• Volume: 76
• Category: Article
• ISSN: 0368-2048
• DOI: 10.1016/0368-2048(95)02477-8