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Carbon nitride thin films formed by low energy ion beam deposition with positive and negative ions

โœ Scribed by B. Enders; Y. Horino; N. Tsubouchi; A. Chayahara; A. Kinomura; K. Fujii


Book ID
114168546
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
672 KB
Volume
121
Category
Article
ISSN
0168-583X

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