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Growth of carbon thin film by low-energy mass-selected ion beam deposition

✍ Scribed by H Ohno; J.A van den Berg; S Nagai; D.G Armour

Book ID: 114170816
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 156 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00874-x

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