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Chromium nitride films formed by ion beam assisted deposition at low nitrogen ion energies in comparison to high energies

โœ Scribed by W. Ensinger; S. Flege; M. Kiuchi; K. Honjo


Book ID
113823398
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
617 KB
Volume
272
Category
Article
ISSN
0168-583X

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