Positive and negative low-energy ion beam deposition apparatus and applications

Simultaneous mass-analyzed positive and

Simultaneous mass-analyzed positive and negative low-energy ion beam deposition apparatus

✍ Yuji Horino; Nobuteru Tsubouchi; Kanenaga Fujii; Toshitake Nakata; Toshinori Tak 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 435 KB

Carbon nitride thin films formed by low

Carbon nitride thin films formed by low energy ion beam deposition with positive and negative ions

✍ B. Enders; Y. Horino; N. Tsubouchi; A. Chayahara; A. Kinomura; K. Fujii 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 672 KB

Low energy ion beam deposition with posi

Low energy ion beam deposition with positive and negative ions – experiments to and modeling of subsurface growth

✍ B Enders; C Heck; N Tsubouchi; A Chayahara; A Kinomura; Y Horino; K Fujii 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 109 KB

Low energy ion implanter for negative an

Low energy ion implanter for negative and positive ions

✍ Yang Feng; Liu Jiarui 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 120 KB

3108. Thin-film deposition using low-ene

3108. Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 133 KB

of Ti to a few percent. Pre-evaporation of a 300 ,~ thick CaF.~ parting layer allowed membrane removal by water-assisted peeling. Pressure testing showed membranes to have bulk tensile strength of 4.6-6.2,'< l09 dyn/cm 2 (68-92 kpsi) and to behave elastically. They could be mounted under high tensio

3109. Thin-film deposition using low-ene

3109. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 133 KB

of Ti to a few percent. Pre-evaporation of a 300 ,~ thick CaF.~ parting layer allowed membrane removal by water-assisted peeling. Pressure testing showed membranes to have bulk tensile strength of 4.6-6.2,'< l09 dyn/cm 2 (68-92 kpsi) and to behave elastically. They could be mounted under high tensio