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Low energy ion beam deposition with positive and negative ions – experiments to and modeling of subsurface growth

✍ Scribed by B Enders; C Heck; N Tsubouchi; A Chayahara; A Kinomura; Y Horino; K Fujii


Book ID
114170810
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
109 KB
Volume
148
Category
Article
ISSN
0168-583X

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