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Carbon etching with a high density plasma etcher

✍ Scribed by Kevin A. Pears; Jens Stolze

Book ID: 108207435
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 483 KB
Volume: 81
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.02.002

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