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Heat transfer between wafer and electrode in a high density plasma etcher

✍ Scribed by Yeon Ho Im; Yoon-Bong Hahn

Book ID: 110630706
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 581 KB
Volume: 19
Category: Article
ISSN: 0256-1115
DOI: 10.1007/bf02698427

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