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C-axis oriented growth of magnetron sputtered YBaCuO thin films on MgO substrates

✍ Scribed by B. Häuser; E. G. Keim; H. Rogalla; A. van Silfhout


Publisher
Springer
Year
1988
Tongue
English
Weight
541 KB
Volume
46
Category
Article
ISSN
1432-0630

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## Abstract ZnO thin films were deposited onto flexible Poly‐Ethylene Terephthalate and Poly‐Ethylene Naphthalate substrates in an ultra‐high vacuum chamber by Pulsed DC Magnetron Sputtering. The process took place at room temperature and in argon atmosphere with fixed pressure, by applying two dif