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Growth and characterization of high resistivity c-axis oriented ZnO films on different substrates by RF magnetron sputtering for MEMS applications

✍ Scribed by Ravindra Singh; Mahesh Kumar; Sudhir Chandra

Publisher: Springer
Year: 2007
Tongue: English
Weight: 660 KB
Volume: 42
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-006-0372-5

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