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Buried oxide layers formed by low dose SIMOX processes

โœ Scribed by B. Aspar; C. Guilhalmenc; C. Pudda; A. Garcia; A.M. Papon; A.J. Auberton-Herve; J.M. Lamure

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
391 KB
Volume
28
Category
Article
ISSN
0167-9317

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