✦ LIBER ✦
Characterization of nano-sized Si islands in buried oxide layer of SIMOX by conducting AFM
✍ Scribed by K.W. Chen; Y.H. Yu; E.Z. Luo; Z. Xie; J.B. Xu; I.H. Wilson; W.Y. Bishop; D.S. Shen
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 238 KB
- Volume
- 376
- Category
- Article
- ISSN
- 0009-2614
No coin nor oath required. For personal study only.