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Bulk micromachining of silicon

✍ Scribed by Kovacs, G.T.A.; Maluf, N.I.; Petersen, K.E.

Book ID: 111875636
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 555 KB
Volume: 86
Category: Article
ISSN: 0018-9219
DOI: 10.1109/5.704259

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