The study of silicon bulk micromachined angular acceleration sensor

✍ Scribed by Jun Mizuno; Kay Nottmeyer; Masanori Amemori; Yoshitaka Kanai; Takashi Kobayashi

• Book ID: 104342901
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 688 KB
• Volume: 21
• Category: Article
• ISSN: 0389-4304
• DOI: 10.1016/s0389-4304(99)00064-8

✦ Synopsis

The measurement and control of motion is increasingly required in automotive and robotics applications, where cheap sensors are highly desirable. In this "eld silicon technology is a good approach in terms of performance/price ratio since complex functions can be integrated into a single device. A bulk silicon micromachined structure 6.4 mm;6.4 mm in size was designed and fabricated, which can detect angular acceleration and acceleration simultaneously and independently. This is accomplished by capacitive detection of the tilt due to angular acceleration and the displacement due to acceleration of mass by torsion bar.