✦ LIBER ✦
Measurements of the mechanical behaviour of micromachined silicon and silicon-nitride membranes for microphones, pressure sensors and gas flow meters
✍ Scribed by R. Schellin; G. Hess; W. Kühnel; C. Thielemann; D. Trost; J. Wacker; R. Steinmann
- Book ID
- 108028327
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 585 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0924-4247
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