𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Fibre-optical MEMS switches based on bulk silicon micromachining

✍ Scribed by M. Hoffmann; P. Kopka; D. Nüsse; E. Voges

Book ID
106184555
Publisher
Springer-Verlag
Year
2003
Tongue
English
Weight
210 KB
Volume
9
Category
Article
ISSN
0946-7076

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Piezoelectric MEMS generator based on th
Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique
✍ Tang, Gang ;Liu, Jing-quan ;Liu, He-sheng ;Li, Yi-gui ;Yang, Chun-sheng ;He, Dan 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 644 KB

## Abstract A MEMS‐based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O~3~ (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to ob

Digital optical switch based on amorphou
Digital optical switch based on amorphous silicon waveguide
✍ L. Sirleto; M. Iodice; F.G. Della Corte; I. Rendina 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 374 KB

In this paper, the performance of a digital optical switch, operating at the infrared communications wavelength of 1550 nm and based on the thermo-optic effect in amorphous silicon, are investigated. We prove that the strong thermo-optic effect of amorphous silicon, combined with the possibility of

Electro-optic polymer assisted optical s
Electro-optic polymer assisted optical switch based on silicon slot structure
✍ Simiao Xiao; Fan Wang; Xiang Wang; Yinlei Hao; Xiaoqing Jiang; Minghua Wang; Jia 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 433 KB

One kind of electro-optic polymer assisted Mach-Zehnder optical switch based on silicon slot structure is presented in this paper. The interference arms of the switch are slot structures instead of regular singlemode waveguides. By filling electro-optic material in the void slot of the arms, direct