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Borophosphosilicate glass films in silicon microelectronics, part 2: Structure and applications

✍ Scribed by V. Y. Vasilev

Book ID: 106523785
Publisher: Springer
Year: 2005
Tongue: English
Weight: 170 KB
Volume: 34
Category: Article
ISSN: 1063-7397
DOI: 10.1007/s11180-005-0020-9

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