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Borophosphosilicate Glass Films in Silicon Microelectronics, Part 1: Chemical Vapor Deposition, Composition, and Properties

✍ Scribed by V. Y. Vasilev

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Borophosphosilicate glass films in silic

✍ V. Y. Vasilev 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 170 KB

Interrelation between the Parameters of

✍ V. Yu. Vasilev 📂 Article 📅 2003 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 70 KB

Composition, etching and optical propert

✍ B. Reynes; C. Ance; J.P. Stoquert; J.C. Bruyère 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 340 KB