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Boron activation and diffusion in silicon and strained silicon-on-insulator by rapid thermal and flash lamp annealings

✍ Scribed by Lanzerath, F.; Buca, D.; Trinkaus, H.; Goryll, M.; Mantl, S.; Knoch, J.; Breuer, U.; Skorupa, W.; Ghyselen, B.


Book ID
118739335
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
483 KB
Volume
104
Category
Article
ISSN
0021-8979

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