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Anomalous Enhanced Diffusion and Electrical Activation of Boron in Silicon After Rapid Isothermal Annealing

✍ Scribed by Guimarães, S. ;Kögler, R. ;Landi, E. ;Solmi, S. ;Wieser, E.


Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
559 KB
Volume
93
Category
Article
ISSN
0031-8965

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