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Borides of Ag and Au prepared by magnetron sputtering

โœ Scribed by Joshua Pelleg; M. Rotman; M. Sinder

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
462 KB
Volume
466
Category
Article
ISSN
0921-4534

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Structure and property of Ge/Si nanomult
Structure and property of Ge/Si nanomultilayers prepared by magnetron sputtering
โœ Shihua Huang; Zhou Xia; Hong Xiao; Jufang Zheng; Yunlong Xie; Guanqun Xie ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 316 KB

Ge/Si nanomultilayers were prepared using magnetron sputtering deposition and adjusting the growth conditions, such as the substrate temperature, sputtering pressure, sputtering power and annealing temperature. The surface topography and microstructure of the nanomultilayers were characterized by X-