The paper presents the results obtained on the deposition and characterization of niobium carbide thin films obtained by reactive magnetron sputtering method in a reactive atmosphere composed by Ar and CH 4 . The coatings were deposited on Si substrates, at 100 °C, 400 °C and 750 °C, at two differen
Preparation and characterization of Ag-coated cenospheres by magnetron sputtering method
✍ Scribed by Xiaozheng Yu; Zhigang Shen; Zheng Xu
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 516 KB
- Volume
- 265
- Category
- Article
- ISSN
- 0168-583X
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