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Behavior of charged particles in an electron cyclotron resonance plasma chemical vapor deposition reactor

✍ Scribed by Nakayama, Yoshikazu; Kondoh, Mitsuru; Hitsuishi, Kohji; Zhang, Mei; Kawamura, Takao


Book ID
120521272
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
534 KB
Volume
57
Category
Article
ISSN
0003-6951

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