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Auger electron spectroscopy of a hydrogenated amorphous silicon

✍ Scribed by M. Láznička


Book ID
112568665
Publisher
Springer
Year
1980
Tongue
English
Weight
341 KB
Volume
30
Category
Article
ISSN
0011-4626

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Auger line shape analysis of hydrogenate
✍ N.A. Burnham; A.B. Swartzlander; A.J. Nelson; L.L. Kazmerski 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 289 KB

Auger line shape analysis of the Si L23VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23VV peak was deconvoluted into its L23