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Auger line shape analysis of hydrogenated amorphous silicon

โœ Scribed by N.A. Burnham; A.B. Swartzlander; A.J. Nelson; L.L. Kazmerski

Publisher
Elsevier Science
Year
1987
Weight
289 KB
Volume
21
Category
Article
ISSN
0379-6787

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โœฆ Synopsis

Auger line shape analysis of the Si L23VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23VV peak was deconvoluted into its L23MlM23, L23M23M23 and localized two-hole components. The relative amounts of the L23VV components were compared with the hydrogen concentration. The results show that Auger line shape analysis may be used as (i) a semiquantitative monitor of the hydrogenation of amorphous silicon and (ii) a probe of the valence band of hydrogenated amorphous silicon.

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