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Optical spectroscopy of hydrogenated amorphous silicon

✍ Scribed by Jacques I. Pankove


Publisher
Elsevier Science
Year
1988
Weight
320 KB
Volume
24
Category
Article
ISSN
0379-6787

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Dopant concentration measurements in hyd
✍ J.C. Zesch; R.A. Lujan; V.R. Deline πŸ“‚ Article πŸ“… 1980 πŸ› Elsevier Science βš– 350 KB

R.f. glow discharge optical spectroscopy (GDOS) is demonstrated to be a useful technique with which to measure absolute dopant concentrations in hydrogenated amorphous silicon (a-Si:H) films. The measurement technique and method of calibration are described. GDOS measurements of boron concentrations