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Atomic Layer Deposition research

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📜 SIMILAR VOLUMES

Substrate-Independent Palladium Atomic L

✍ J.J. Senkevich; F. Tang; D. Rogers; J.T. Drotar; C. Jezewski; W.A. Lanford; G.-C 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 382 KB

Film Uniformity in Atomic Layer Depositi

✍ K.-E. Elers; T. Blomberg; M. Peussa; B. Aitchison; S. Haukka; S. Marcus 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 544 KB

Monolayer thickness in atomic layer depo

✍ Markku Ylilammi 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 860 KB

Atomic layer deposition high fashion, 20

✍ Gail Purvis 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 96 KB

Atomic layer deposition of nanoporous bi

✍ Roger J Narayan; Shashishekar P Adiga; Michael J Pellin; Larry A Curtiss; Shane 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 713 KB

Deposition of HfO2 on InAs by atomic-lay

✍ D. Wheeler; L.-E. Wernersson; L. Fröberg; C. Thelander; A. Mikkelsen; K.-J. West 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 395 KB