𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Atomic layer deposition of nanoporous biomaterials

✍ Scribed by Roger J Narayan; Shashishekar P Adiga; Michael J Pellin; Larry A Curtiss; Shane Stafslien; Bret Chisholm; Nancy A Monteiro-Riviere; Robin L Brigmon; Jeffrey W Elam


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
713 KB
Volume
13
Category
Article
ISSN
1369-7021

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Deposition of HfO2 on InAs by atomic-lay
✍ D. Wheeler; L.-E. Wernersson; L. FrΓΆberg; C. Thelander; A. Mikkelsen; K.-J. West πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 395 KB
Atomic Layer Deposition of Gadolinium Ox
✍ K. Kukli; T. HatanpÀÀ; M. Ritala; M. LeskelΓ€ πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 320 KB πŸ‘ 1 views

Thin cubic Gd 2 O 3 films are grown by atomic layer deposition (ALD), in the temperature range 300-400 Β°C, using a novel tris(2,3-dimethyl-2-butoxy)gadolinium(III) precursor, Gd[OC(CH 3 ) 2 CH(CH 3 ) 2 ] 3 , and water. The films are crystalline in their as-deposited state. The films contain some res

Plasma-Assisted Atomic Layer Deposition
✍ G. A. Ten Eyck; J. J. Senkevich; F. Tang; D. Liu; S. Pimanpang; T. Karaback; G.- πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 527 KB