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Deposition of HfO2 on InAs by atomic-layer deposition

✍ Scribed by D. Wheeler; L.-E. Wernersson; L. Fröberg; C. Thelander; A. Mikkelsen; K.-J. Weststrate; A. Sonnet; E.M. Vogel; A. Seabaugh

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
395 KB
Volume
86
Category
Article
ISSN
0167-9317

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