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Atomic layer deposition of titanium nitride from TDMAT precursor

✍ Scribed by J. Musschoot; Q. Xie; D. Deduytsche; S. Van den Berghe; R.L. Van Meirhaeghe; C. Detavernier

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 434 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.09.036

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