✦ LIBER ✦

Atomic Layer Deposition of Thin Films Using O 2 as Oxygen Source

✍ Scribed by Schuisky, Mikael; Aarik, Jaan; Kukli, Kaupo; Aidla, Aleks; Hårsta, Anders

Book ID: 120194978
Publisher: American Chemical Society
Year: 2001
Tongue: English
Weight: 140 KB
Volume: 17
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la010174+

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Atomic Layer Deposition of Oxide Thin Fi

Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

✍ Ritala, M. 📂 Article 📅 2000 🏛 American Association for the Advancement of Scienc 🌐 English ⚖ 346 KB

Atomic Layer Deposition of MgF 2 Thin Fi

Atomic Layer Deposition of MgF 2 Thin Films Using TaF 5 as a Novel Fluorine Source

✍ Pilvi, Tero; Puukilainen, Esa; Kreissig, Ulrich; Leskelä, Markku; Ritala, Mikko 📂 Article 📅 2008 🏛 American Chemical Society 🌐 English ⚖ 980 KB

Atomic Layer Deposition Al2O3 Thin Films

Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source

✍ Xingcun Li; Qiang Chen; Lijun Sang; Lizhen Yang; Zhongwei Liu; Zhenduo Wang 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 696 KB

Effects of ozone as an oxygen source on

Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition

✍ Jaebum Kim; Kuntal Chakrabarti; Jinho Lee; Ki-Young Oh; Chongmu Lee 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 166 KB

Atomic Layer Deposition of Iron Oxide Th

Atomic Layer Deposition of Iron Oxide Thin Films and Nanotubes using Ferrocene and Oxygen as Precursors

✍ Ma˚rten Rooth; Anders Johansson; Kaupo Kukli; Jaan Aarik; Mats Boman; Anders Hår 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 193 KB 👁 1 views

Oxygen sensitivity of SrTiO3 thin film p

Oxygen sensitivity of SrTiO3 thin film prepared using atomic layer deposition

✍ Toru Hara; Takashi Ishiguro 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 897 KB