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Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

✍ Scribed by Ritala, M.

Book ID: 121162404
Publisher: American Association for the Advancement of Science
Year: 2000
Tongue: English
Weight: 346 KB
Volume: 288
Category: Article
ISSN: 0036-8075
DOI: 10.1126/science.288.5464.319

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