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ATOMIC LAYER DEPOSITION OF SiO 2 USING CATALYZED AND UNCATALYZED SELF-LIMITING SURFACE REACTIONS

✍ Scribed by KLAUS, J. W.; SNEH, O.; OTT, A. W.; GEORGE, S. M.

Book ID: 120293941
Publisher: World Scientific Publishing Company
Year: 1999
Tongue: English
Weight: 727 KB
Volume: 06
Category: Article
ISSN: 0218-625X
DOI: 10.1142/S0218625X99000433

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