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A quantum chemical study of ZrO2 atomic layer deposition growth reactions on the SiO2 surface

✍ Scribed by Joseph H. Han; Guilian Gao; Yuniarto Widjaja; Eric Garfunkel; Charles B. Musgrave

Book ID: 108278824
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 606 KB
Volume: 550
Category: Article
ISSN: 0039-6028
DOI: 10.1016/j.susc.2003.12.030

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