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Atomic Layer Deposition of SiO 2 Films on BN Particles Using Sequential Surface Reactions

✍ Scribed by Ferguson, J. D.; Weimer, A. W.; George, S. M.

Book ID: 120292861
Publisher: American Chemical Society
Year: 2000
Tongue: English
Weight: 357 KB
Volume: 12
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm000313t

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