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Atomic Layer Deposition of Lanthanum Oxide Films for High-κ Gate Dielectrics

✍ Scribed by He, Weiming; Schuetz, Steven; Solanki, Raj; Belot, John; McAndrew, James

Book ID: 127365773
Publisher: The Electrochemical Society
Year: 2004
Tongue: English
Weight: 109 KB
Volume: 7
Category: Article
ISSN: 1099-0062
DOI: 10.1149/1.1724824

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