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Molecular beam epitaxy grown template for subsequent atomic layer deposition of high κ dielectrics

✍ Scribed by Lee, K. Y.; Lee, W. C.; Lee, Y. J.; Huang, M. L.; Chang, C. H.; Wu, T. B.; Hong, M.; Kwo, J.


Book ID
126171708
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
346 KB
Volume
89
Category
Article
ISSN
0003-6951

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