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Atomic Layer Deposition of Copper Oxide using Copper(II) Acetylacetonate and Ozone

✍ Scribed by Mari Endresen Alnes; Edouard Monakhov; Helmer Fjellvåg; Ola Nilsen


Book ID
112071805
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
401 KB
Volume
18
Category
Article
ISSN
0948-1907

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