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Synthesis and Characterization of Copper(I) Amidinates as Precursors for Atomic Layer Deposition (ALD) of Copper Metal

✍ Scribed by Li, Zhengwen; Barry, Seán T.; Gordon, Roy G.

Book ID: 120060763
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 229 KB
Volume: 44
Category: Article
ISSN: 0020-1669
DOI: 10.1021/ic048492u

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