✦ LIBER ✦
Bis(tert-butylimido)-bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: the Effect of the Alkyl Group
✍ Scribed by Ville Miikkulainen; Mika Suvanto; Tapani A. Pakkanen
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 149 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0948-1907
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