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Atomic layer deposition of chromium oxide nanolayers

✍ Scribed by Yu. K. Ezhovskii; M. A. Kirillova

Book ID: 110166095
Publisher: SP MAIK Nauka/Interperiodica
Year: 2007
Tongue: English
Weight: 180 KB
Volume: 43
Category: Article
ISSN: 0020-1685
DOI: 10.1134/s0020168507120126

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