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Atomic layer controlled deposition of SiO2 and Al2O3 using ABAB… binary reaction sequence chemistry

✍ Scribed by S.M. George; O. Sneh; A.C. Dillon; M.L. Wise; A.W. Ott; L.A. Okada; J.D. Way

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
742 KB
Volume
82-83
Category
Article
ISSN
0169-4332

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