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Atomic Layer Deposition of Gadolinium Aluminate using Gd(iPrCp)3, TMA, and O3 or H2O

✍ Scribed by Christoph Adelmann; Dieter Pierreux; Johan Swerts; Daan Dewulf; An Hardy; Hilde Tielens; Alexis Franquet; Bert Brijs; Alain Moussa; Thierry Conard; Marlies K. Van Bael; Jan W. Maes; Malgorzata Jurczak; Jorge A. Kittl; Sven Van Elshocht

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 587 KB
Volume: 16
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200906833

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