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Self-limiting behavior of the growth of Al2O3 using sequential vapor pulses of TMA and H2O2

✍ Scribed by Jia-Fa Fan; Koichi Toyoda

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 648 KB
Volume: 60-61
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(92)90510-5

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