Atomic layer deposition of Al2O3 and SiO
✍
J.D Ferguson; A.W Weimer; S.M George
📂
Article
📅
2000
🏛
Elsevier Science
🌐
English
⚖ 764 KB
Al O and SiO were deposited on BN particles with atomic layer control using alternating exposures of Al CH rH O 2 3 2 3 3 2 and SiCl rH O, respectively. The sequential surface chemistry was monitored in vacuum using transmission Fourier 4 2 Ž . transform infrared FTIR spectroscopy studies on high su