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Atomic force microscopy study of the microroughness of SiC thin films

✍ Scribed by M. Blouin; D. Guay; M.A. El Khakani; M. Chaker; S. Boily; A. Jean

Book ID
107864438
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
546 KB
Volume
249
Category
Article
ISSN
0040-6090

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