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Nano-oxidation of Vanadium Thin Films using Atomic Force Microscopy

✍ Scribed by P. O. Vaccaro; S. Sakata; S. Yamaoka; I. Umezu; A. Sugimura

Book ID
110238721
Publisher
Springer
Year
1998
Tongue
English
Weight
65 KB
Volume
17
Category
Article
ISSN
0261-8028

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## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t